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GB/T 35306-2023 Active
GB/T 35306-2023 Determination of carbon and oxygen content in single crystal silicon—Low temperature fourier transform infrared spectrometry method
Abstract
This document describes the method of determining the substitutional carbon and interstitial oxygen content in silicon single crystals using low-temperature Fourier transform infrared spectroscopy.
This document is suitable for determining the substitutional carbon and interstitial oxygen content in n-type silicon single crystals with a room-temperature resistivity greater than 1 Ω·cm and p-type silicon single crystals with a room-temperature resistivity greater than 3 Ω·cm. The measurement range (in terms of atomic number) is 2.5×1014 cm-3 to 1.5×1017 cm-3.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 35306-2023 |
| CCS | Analysis methods for semi-metallic and semiconductor materials |
| ICS | \nMetal material testing |
| Implement Date | 2024-03-01 |
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