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GB/T 20307-2006 Active
GB/T 20307-2006 General rules for nanometer-scale length measurement by SEM
Abstract
This standard specifies the basic principles for measuring nanoscale lengths using scanning electron microscopy. It is applicable to measuring the spacing between points or lines ranging from 10 nm to 500 nm.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 20307-2006 |
| CCS | Electronic optics and other physical optical instruments |
| ICS | Measurement of length and angle |
| Implement Date | 2007-02-01 |
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