DB53/T 618-2014 Active Yunnan ProvinceLocal standards

DB53/T 618-2014 Determining the composition of hydrogen tail gas in polycrystalline silicon production using gas chromatography

Publish Date: 2014-08-28 Implement Date: 2014-12-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: DB53/T 618-2014

Standard Type: Local standards

Standard Status: Active

is_force_gb: no

CCS Name: Inorganic chemical raw materials

ICS Name: Chemical analysis

Publish Date: 2014-08-28

Implement Date: 2014-12-01

Scope

This standard specifies the method outline, reagents and materials, instruments and devices, analysis steps, result calculation, precision, and test reports for determining the content of hydrogenated tail gas components in polysilicon production by gas chromatography. This standard is applicable to the determination of the contents of hydrogen (H2), hydrogen chloride (HCl), dichlorodihydrogensilane (SiH2Cl2), trichlorohydrogensilane (SiHCl3), and silicon tetrachloride (SiCl4) in hydrogenated tail gas.