GB/T 40577-2021 Active National standards

GB/T 40577-2021 Terminology for integrated circuit(IC) manufacturing equipment

Publish Date: 2021-10-11 Implement Date: 2022-05-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 40577-2021

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Electronic industry production equipment

ICS Name: Electromechanical components for electronic and telecommunications equipment

Publish Date: 2021-10-11

Implement Date: 2022-05-01

Pages: 56 pages

Scope

This document specifies the basic and commonly used terms of integrated circuit (IC) manufacturing equipment, including fundamental terms, crystal growth processing equipment, mask manufacturing equipment, lithography and etching equipment, doping equipment, film deposition equipment, cleaning equipment, packaging equipment, testing equipment terms, and common component terms.
This document is applicable to the design, development, production, and application of integrated circuit manufacturing equipment, as well as to scientific research, teaching, and publication work related to integrated circuit manufacturing equipment.