GB/T 2413-1981
Active
GB/T 44928-2024
Active
National standards
GB/T 44928-2024 Terms of microlithography technology for microelectronics
GB/T 44928-2024 Terms of microlithography technology for microelectronics
Basic Information
Standard Code:
GB/T 44928-2024
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Electronic devices and specialized materials, parts, and structural components
ICS Name:
Special materials for electronic technology
Publish Date:
2024-12-31
Implement Date:
2024-12-31
Pages:
192 pages
Scope
This document defines terms and definitions related to microelectronics lithography technology, including advanced lithography technology, micro-lithography patterning and graphics data processing technology, micro-lithography photosensitive materials, chrome plates and substrate materials, photomask technology, lithography process (exposure, etching, and micro-nano processing) technology, electron beam mask manufacturing and direct writing technology, lithography and mask quality parameter measurement and evaluation, mask manufacturing equipment, and micro-lithography equipment.
This document is applicable to teaching, scientific research, production, application, trade, and technical exchanges in the field of microelectronics lithography technology.
Development Information
Related Standards
GB/T 3389.4-1982
Replaced
GB/T 3389.4-1982 Test methods for the properties of piezoelectric ceramics—Longitudinal length extension vibration mode for rod
GB/T 5594.1-1985
Active
GB/T 5594.1-1985 Test methods for properties of structure ceramic used in electronic components—Test method for gas-tightness
GB/T 5594.2-1985
Active
GB/T 5594.2-1985 Test methods for properties of structure ceramic used in electronic components—Test method for Youngs elastic modulus and Poisson ratio
GB/T 5594.3-1985
Replaced
GB/T 5594.3-1985 Test methods for properties of structure ceramic used in electronic components—Test method for mean coefficient of linear expansion
GB/T 5594.4-1985
Replaced