GB/T 42604-2023 Vacuum technology—Vacuum gauges—Specification for hot cathode ionization gauges

Scope

This document defines the terms related to thermal cathode ionization vacuum gauges and specifies the specific parameters that manufacturers of thermal cathode ionization vacuum gauges must provide, as well as the measurement uncertainty components that need to be considered when operating these instruments. The reasons are as follows.
a) This document updates some of the terms and definitions given in ISO 3529-3:1981.
b) Thermal cathode ionization vacuum gauges are typically used as reference standards. This document clearly specifies the relevant information for laboratories to properly calibrate vacuum gauges under high and ultra-high vacuum conditions. When using ionization vacuum gauges to conduct traceable pressure measurements in high and ultra-high vacuum environments, it is appropriate to cite information containing the relevant parameters and characteristics of the vacuum gauges in the manufacturer's instructions.
c) This document also lists the important uncertainty components related to pressure measurements with ionization vacuum gauges and provides guidelines for evaluating these uncertainty components. For some current or future vacuum gauges, the list of uncertainty components may not be comprehensive.
d) When using ionization vacuum gauges as reference standards, this document supplements ISO/TS 3567 and ISO/TS 27893.

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