GB/Z 42625-2023 Active National standards

GB/Z 42625-2023 Vacuum technology—Vacuum gauges—Characterization of quadrupole mass spectrometers for partial pressure measurement

Publish Date: 2023-05-23 Implement Date: 2023-05-23 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/Z 42625-2023

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Vacuum technology and equipment

ICS Name: Vacuum technology

Publish Date: 2023-05-23

Implement Date: 2023-05-23

Pages: 24 pages

Scope

This document specifies the characteristics of a quadrupole mass spectrometer with an electron bombardment ion source, for which the atomic mass-to-charge ratio (m/z) is less than 300.
This document is not applicable to quadrupole mass spectrometers equipped with other types of ion sources, such as chemical ionization ion sources, photoionization ion sources, or field ionization ion sources, nor to quadrupole mass spectrometers used for analyzing samples with higher m/z values, which are primarily used for detecting organic materials.
According to published literature, the metrological characteristics of quadrupole mass spectrometers depend on the instrument settings, total pressure, and gas mixture composition. Therefore, it is impractical to calibrate quadrupole mass spectrometers under all application conditions. The specification methods defined in this document include continuous leak monitoring of the vacuum system, leak rate measurement using tracer gases, residual gas analysis, and material outgassing rate testing. Users can select the specification method that suits their needs, and other applications can also refer to the specification methods in this document.
It is known that some parameters of quadrupole mass spectrometers have poor stability, especially sensitivity. Therefore, calibrated parameters still need to be recalibrated repeatedly when higher accuracy is required. In actual working conditions, only on-site calibration is possible. Therefore, this document not only describes how quadrupole mass spectrometers can be calibrated in a calibration laboratory or by a national metrology institution and directly traced to the International System of Units (SI), but also describes how the calibrated parameters can be checked and maintained on-site.
According to their physical principles, quadrupole mass spectrometers require a high vacuum environment. By reducing the intake size or combining a special ion source with a split pump,