YS/T 1059-2015 Active Industry standards-Non-ferrous metals

YS/T 1059-2015 Determination of total carbon content in trichlorosilane for silicon eqitaxy—Gas chromatographic method

Publish Date: 2015-04-30 Implement Date: 2015-10-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: YS/T 1059-2015

Standard Type: Industry standards

Standard Status: Active

is_force_gb: no

CCS Name: Analysis methods for semi-metallic and semiconductor materials

ICS Name: Chemical analysis of metal materials

Publish Date: 2015-04-30

Implement Date: 2015-10-01

Pages: 7 pages

Scope

This standard specifies the gas chromatography method for determining the total carbon content in trichlorosilane used for silicon epitaxy.
This standard is applicable to the determination of the total carbon content in trichlorosilane used for silicon epitaxy, with a measurement range of 0.0005% to 0.005%.

Development Information

Word Count: 12 Thousand words Pages: 7 pages

Related Standards

GB/T 2596-1981 Abolished

GB/T 2596-1981 Tungsten powder and tungsten carbide powder—Determination of specific surface product (average grainine- ss—Simplified nitrogen absorption method

Publish Date: 1981-06-07

GB/T 3249-1982 Replaced

GB/T 3249-1982 Standard method for determination of particle size of powders of refractory metals and compounds—Fisher method

Publish Date: 1982-06-21

GB/T 3488-1983 Replaced

GB/T 3488-1983 Hardmetals—metallographic determination of microstructure

Publish Date: 1983-02-21

GB/T 3489-1983 Replaced

GB/T 3489-1983 Hardmetals—Metallographic determination of porosity and uncombined carbon

Publish Date: 1983-02-21

GB/T 3651-1983 Replaced

GB/T 3651-1983 Measuring method for thermal conductivity of metal at high temperature

Publish Date: 1983-05-02

GB/T 4059-1983 Replaced

GB/T 4059-1983 Polycrystalline silicon—Examination method—Zone-melting on phosphorus under controlled atmosphere

Publish Date: 1983-12-20