YS/T 644-2007 Determination method of Pt-Ru alloy film—Determination of alloyed Pt content and alloyed Ru content by X-ray photoelectron spectroscopy
YS/T 644-2007 Determination method of Pt-Ru alloy film—Determination of alloyed Pt content and alloyed Ru content by X-ray photoelectron spectroscopy
Basic Information
Scope
This standard specifies the determination method of the content (mass fraction) of alloyed platinum and alloyed ruthenium in platinum-ruthenium (PtRu) alloy thin film materials. This standard is applicable to the determination of the mass fraction of alloyed platinum and alloyed ruthenium in platinum-ruthenium alloy thin film materials, and can also be applied to the determination of the mass fraction of alloyed platinum and other alloyed metals in various platinum alloy thin film materials. The determination range: the mass fraction of alloyed platinum is not less than 3%, and the mass fraction of alloyed ruthenium is not less than 3%. This standard is not applicable to layered thin films with a single layer thickness of no more than 10 nm.