GB/Z 43684-2024 Nanotechnologies—Description, measurement and dimensional quality parameters of gratings
GB/Z 43684-2024 Nanotechnologies—Description, measurement and dimensional quality parameters of gratings
Basic Information
Scope
This document defines general terms for interpreting the global and local quality parameters of gratings based on their grating characteristics and deviations from their nominal positions, and provides guidance on the classification of measurement and evaluation methods used to determine these parameters, as well as guidance on ensuring the quality of gratings in different application fields of nanotechnology. The methods defined and described in this document are applicable to different types of gratings, but the focus of this document is on one-dimensional (1D) and two-dimensional (2D) gratings, to facilitate their use among manufacturers, users, and calibration laboratories involved in the characterization of the size and quality parameters of gratings in the nanotechnology field.