GB/T 3163-1993
Replaced
GB/T 43916-2024
Active
National standards
GB/T 43916-2024 Vacuum technology—Vacuum gauges—Specifications,calibration and measurement uncertainties for capacitance diaphragm gauges
GB/T 43916-2024 Vacuum technology—Vacuum gauges—Specifications,calibration and measurement uncertainties for capacitance diaphragm gauges
Basic Information
Standard Code:
GB/T 43916-2024
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Vacuum technology and equipment
ICS Name:
Vacuum technology
Publish Date:
2024-04-25
Implement Date:
2024-04-25
Pages:
24 pages
Scope
This document defines the relevant terms of the capacitive film vacuum gauge (CDG), specifies the parameters that are necessary for the CDG, describes its calibration process, and the measurement uncertainties that need to be considered during the operation of the instrument. This document is applicable to the use of ISO 3567 and ISO 27893 to calibrate CDGs, and serves as a supplementary explanation when using them as reference standards.
Development Information
Referenced Standards
ISO 3529-1
ISO 3529-3
ISO 3567
ISO 27893
ISO/IEC Guide 98-3
ISO/IEC Guide 99
Adopt standards
ISO 20146:2019
Related Standards
GB/T 3164-1993
Replaced
GB/T 3164-1993 Vacuum technology—Graphical symbols
GB/T 6070-1995
Replaced
GB/T 6070-1995 Vacuum flanges
GB/T 11164-1999
Replaced
GB/T 11164-1999 Vacuum coating plant generic specification
GB/T 18193-2000
Active
GB/T 18193-2000 Vacuum technology—Mass-spectrometer-type leak-detector calibration
GB/T 4982-2003
Replaced