GB/T 34326-2017 Active National standards

GB/T 34326-2017 Surface chemical analysis—Depth profiling—Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS

Publish Date: 2017-09-29 Implement Date: 2018-08-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 34326-2017

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Basic standards and general methods

ICS Name: Chemical analysis

Publish Date: 2017-09-29

Implement Date: 2018-08-01

Pages: 17 pages

Scope

This standard specifies the ion beam alignment methods used in Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) to ensure good depth resolution of sputtering depth profiling and optimal surface cleaning effects. These methods are divided into two categories: one is to measure the ion beam current through a Faraday cup, and the other is to use imaging methods. The Faraday cup method also specifies the measurement of ion beam current density and beam distribution. These methods do not include the optimization of depth resolution. These methods are suitable for ion guns with a beam spot diameter of less than 1 mm.