DZ/T 0101.12-1994
Active
JJF 1917-2021
Active
National Metrology Technical Specifications JJF
JJF 1917-2021 Calibration Specification for Micropattern Standards
JJF 1917-2021 Calibration Specification for Micropattern Standards
Basic Information
Standard Code:
JJF 1917-2021
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
-
Publish Date:
2021-07-28
Implement Date:
2022-01-28
Pages:
12 pages
Scope
This specification is applicable to the calibration of one-dimensional or two-dimensional microscopic rulers with a line width of 0.3 μm or more.
Development Information
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