GB/T 44375-2024 Active National standards

GB/T 44375-2024 Requirements for load ports of 300 mm semiconductor equipment

Publish Date: 2024-08-23 Implement Date: 2025-03-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 44375-2024

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Special processing equipment

ICS Name: Optoelectronics, laser equipment

Publish Date: 2024-08-23

Implement Date: 2025-03-01

Pages: 16 pages

Scope

This document specifies the size requirements for the loading ports of 300 mm wafer semiconductor equipment, primarily including the physical interface between semiconductor equipment and production lines.
This document is applicable to the field of semiconductor equipment design and manufacturing.