GB/T 2596-1981
Abolished
YS/T 1060-2015
Active
Industry standards-Non-ferrous metals
YS/T 1060-2015 Determination of other chlorosilane in trichlorosilane for silicon eqitaxy—Gas chromatographic method
YS/T 1060-2015 Determination of other chlorosilane in trichlorosilane for silicon eqitaxy—Gas chromatographic method
Basic Information
Standard Code:
YS/T 1060-2015
Standard Type:
Industry standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Analysis methods for semi-metallic and semiconductor materials
ICS Name:
Chemical analysis of metal materials
Publish Date:
2015-04-30
Implement Date:
2015-10-01
Pages:
8 pages
Scope
This standard specifies the gas chromatography method for determining the content of other chlorosilanes (including dichlorodihydrogensilane and silicon tetrachloride) in trichlorosilane used for silicon epitaxy.
This standard is applicable to the determination of the content of other chlorosilanes (including dichlorodihydrogensilane and silicon tetrachloride) in trichlorosilane used for silicon epitaxy. The lower limit of detection is 0.002%.
Development Information
Related Standards
GB/T 3249-1982
Replaced
GB/T 3249-1982 Standard method for determination of particle size of powders of refractory metals and compounds—Fisher method
GB/T 3488-1983
Replaced
GB/T 3488-1983 Hardmetals—metallographic determination of microstructure
GB/T 3489-1983
Replaced
GB/T 3489-1983 Hardmetals—Metallographic determination of porosity and uncombined carbon
GB/T 3651-1983
Replaced
GB/T 3651-1983 Measuring method for thermal conductivity of metal at high temperature
GB/T 4059-1983
Replaced