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GB/T 16944-2009
GB/T 16944-2009 Gas for electronic industry—Nitrogen
Abstract
This standard specifies the technical requirements, test methods, and packaging, marking, storage, transportation, and safety of nitrogen used in the electronics industry. This standard applies to gaseous and liquid nitrogen extracted from air by cryogenic methods, as well as nitrogen obtained by electrochemical methods. They are used in the manufacturing of ultra-large-scale integrated circuits for protection, purging, coating, pressurization, chemical vapor deposition, and other purposes.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Replaced |
| Standard Code | GB/T 16944-2009 |
| CCS | Industrial gases and chemical gases |
| ICS | Industrial gases |
| Implement Date | 2010-05-01 |
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