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GB/T 36969-2018 Active
GB/T 36969-2018 Nanotechnology—Method for the measurement of the nanofilm-thickness by atomic force microscopy
Abstract
This standard specifies the principles, test conditions, equipment, samples, test steps, and data processing for measuring the thickness of nanofilms using atomic force microscopy (AFM). This standard is applicable to inorganic material films with a nanoscale thickness that are uniform and flat on the surface. The thickness measurement of thicker films and some organic films can also be carried out with reference to this standard.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 36969-2018 |
| CCS | Basic standards and general methods |
| ICS | \nSurface features |
| Implement Date | 2018-12-28 |
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