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GB/T 16596-1996
GB/T 16596-1996 Specification for establishing a wafer coordinate system
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Replaced |
| Standard Code | GB/T 16596-1996 |
| CCS | \nTest methods for the physical properties of metals |
| ICS | Semiconductor materials |
| Implement Date | 1997-04-01 |
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$ 36
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$ 36
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$ 36