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GB/T 26250-2010 Active
GB/T 26250-2010 Gases for electronic industry—Arsine
Abstract
This standard specifies the technical requirements, test methods, and packaging, marking, storage, transportation, and safety of arsine.
This standard applies to arsine obtained by the reaction of arsenic compounds with acids. In the preparation of semiconductor devices, arsine is used for doping and the epitaxy of compound semiconductors.
Molecular formula: AsH3.
Relative molecular mass: 77.945 42 (calculated according to the 2007 International Relative Atomic Mass).
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 26250-2010 |
| CCS | Industrial gases and chemical gases |
| ICS | Industrial gases |
| Implement Date | 2011-05-01 |
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