T/AHEMA 23-2022 Active

Scope: This document specifies the product classification, technical requirements, test methods, and transportation and storage of MEMS VOC gas sensors. This document applies to MEMS sensor chip bodies and packaged sensor devices used for monitoring VOC gases. Main technical contents: 4. Technical requirements 4.1.1 Humidity requirements: Conduct humidity tests on the test samples. During the test, the samples should function normally and meet the requirements of Item 4.2. 4.1.2 Temperature requirements: Conduct low-temperature, normal-temperature, and high-temperature tests on the test samples. During the test, the samples should function normally and meet the requirements of Item 4.2. 4.1.3 Atmospheric pressure requirements: Conduct tests on the test samples under different atmospheric pressures. During the test, the samples should function normally and meet the requirements of Item 4.2. Appearance requirements: a) The shape, dimensions of each part, and processing quality of the sensor chip should comply with the drawings. b) The packaged devices should comply with the drawings and be firmly installed. c) The packaged devices should not have cracks, damage, or breakage. d) When the sensor is powered on for inspection, the displayed voltage and current readings should remain within a constant range. Performance requirements: 4.3.1 Stability: Conduct multiple measurements on MEMS VOC gas sensors and compare them with the standard values. The relative standard deviation of the same sensor should not exceed ±5%, and the relative standard deviation of different sensors in the same batch should not exceed ±10%. 4.3.2 Response time (T90): The response time of MEMS VOC gas sensors should not exceed 30 seconds. 4.3.3 Recovery time (T10): The recovery time of MEMS VOC gas sensors should not exceed 60 seconds. 4.3.4 Response error: For VOC gas sensor chips, the response error of the sensor should not exceed ±10% of the concentration standard point. 4.3.5 Sensitivity require