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GB/T 2900.104-2021 Active
GB/T 2900.104-2021 Electrotechnical terminology—Micro-electromechanical devices
Abstract
This document defines the general, scientific, and engineering terms, as well as the terms related to materials science, functional elements, processing technologies, bonding and assembly technologies, measurement technologies, and applications of micro-electromechanical systems (MEMS).
This document is applicable to the field of micro-electromechanical technology.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 2900.104-2021 |
| CCS | Basic standards and general methods |
| ICS | Electric engineering (vocabulary) |
| Implement Date | 2022-05-01 |
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