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GB/T 33523.603-2022 Active
GB/T 33523.603-2022 Geometrical product specifications (GPS)—Surface texture:Areal—Part 603:Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
Abstract
This document specifies the metrological characteristics of the microscope used for measuring the contour and surface structure of regions using the phase-shifting interferometry (PSI) method.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 33523.603-2022 |
| CCS | Basic standards and general methods |
| ICS | \nSurface features |
| Implement Date | 2023-04-01 |
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