T/CIET 1178-2025 Active Group standards

Technical Requirements for the Microwave Plasma Chemical Vapor Deposition System, T/CIET 1178-2025

T/CIET 1178-2025 Microwave plasma chemical vapor deposition system technical requirements

Publish Date: 2025-04-16 Implement Date: 2025-04-16 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CIET 1178-2025

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Analysis Chemistry Comprehensive

Publish Date: 2025-04-16

Implement Date: 2025-04-16

Scope

Scope: This document specifies the abbreviations, working principles, working environment and operating conditions, system structure, system characteristics, process systems and equipment, operation and maintenance, and test methods of microwave plasma chemical vapor deposition systems. This document is applicable to microwave plasma chemical vapor deposition systems; Main technical content: This document specifies the abbreviations, working principles, working environment and operating conditions, system structure, system characteristics, process systems and equipment, operation and maintenance, and test methods of microwave plasma chemical vapor deposition systems. This document is applicable to microwave plasma chemical vapor deposition systems.