T/SICA 008-2025 Active Group standards

T/SICA 008-2025 Semiconductor IBO Overlay Inspection Specification for Equipment Acceptance

T/SICA 008-2025 Semiconductor IBO overlay equipment acceptance specification

Publish Date: 2025-06-03 Implement Date: 2025-07-03 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us
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Basic Information

Standard Code: T/SICA 008-2025
Standard Type: Group standards
Standard Status: Active
is_force_gb: no
CCS Name: Optical equipment
ICS Name: Integrated circuits, microelectronics
Publish Date: 2025-06-03
Implement Date: 2025-07-03

Scope

Main technical content: This document specifies the technical requirements for the acceptance of overlay measurement equipment, including the structure and principle of graphic testing, the main parameters of equipment acceptance, and other aspects. This document is applicable to first-generation semiconductors represented by silicon (Si) and germanium (Ge), second-generation compound semiconductors represented by gallium arsenide (GaAs) and indium phosphide (InP), and third-generation semiconductors represented by silicon carbide (SiC) and gallium nitride (GaN).

Development Information

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