Installation Procedures for the T/GDID 1100-2024 Tube-Type Diffusion Oxidation Annealing Furnace
T/GDID 1100-2024
Basic Information
Scope
Scope: This document specifies the terms and definitions, basic requirements, equipment positioning, installation of quartz tubes, installation of furnace mouth flanges and furnace doors, furnace covers, installation of furnace tail flanges and furnace doors, installation of graphite boat support brackets, installation of K-type armored thermocouples, installation of boat pushing and paddle assemblies, installation of tubes, installation of paddles, installation of vacuum pumps and vacuum pipelines, and requirements for power cables, signal cables, and sensors for the installation of tube-type diffusion oxidation annealing furnaces used in the production of solar cell silicon wafers. This document is applicable to the installation process of tube-type diffusion oxidation annealing furnaces used in the production of solar cell silicon wafers. Main technical contents: The main technical contents include terms and definitions, basic requirements, equipment positioning, installation of quartz tubes, installation of furnace mouth flanges and furnace doors, furnace covers, installation of furnace tail flanges and furnace doors, installation of graphite boat support brackets, installation of K-type armored thermocouples, installation of boat pushing and paddle assemblies, installation of tubes, installation of paddles, installation of vacuum pumps and vacuum pipelines, and requirements for power cables, signal cables, and sensors.