T/ZSA 325-2026 Active Group standards

T/ZSA 325-2026 Performance Test Specifications for Gas Mass Flow Controllers

Publish Date: 2026-01-13 Implement Date: 2026-01-14 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/ZSA 325-2026

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Video, pulse system equipment

ICS Name: Integration, terminology, standardization, and literature (vocabulary)

Publish Date: 2026-01-13

Implement Date: 2026-01-14

Scope

This standard applies to the performance testing and evaluation of gas mass flow controllers used in semiconductor manufacturing equipment. This standard specifies the test content: The test conditions and methods for the accuracy, linearity, repeatability, hysteresis, and dead zone of gas mass flow controllers, the test conditions and methods for the transient response characteristics of gas mass flow controllers to step changes in set points, and the test methods for the impact of inlet and outlet pressure changes on the indicated and actual flow rates of gas mass flow controllers. This standard does not address all safety issues related to the use of gas mass flow controllers. It is the responsibility of the user to establish appropriate safety and health operating procedures and ensure compliance with relevant laws and regulations.