T/SZBX 080-2022 Active Group standards

T/SZBX 080-2022 Phase-shifted laser interferometer

Publish Date: 2022-05-20 Implement Date: 2022-05-30 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/SZBX 080-2022

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Instruments and meters

ICS Name: Optical measurement instruments

Publish Date: 2022-05-20

Implement Date: 2022-05-30

Scope

Scope: This document is applicable to phase-shifting laser interferometers (hereinafter referred to as the instrument) used to test the surface deviation of optical planes, the flatness of flat crystals, the transmitted wavefront, and optical uniformity by means of micro-displacement mechanisms; Main technical content: This document specifies the terms and definitions, types, basic parameters, requirements, test methods, inspection rules, marking, packaging, transportation, and storage of phase-shifting laser interferometers.