T/CMEEEA 102-2026 Active Group standards

T/CMEEEA 102-2026 Mass flow sensor for gas pipes in semiconductor thin film deposition equipment

Publish Date: 2026-02-04 Implement Date: 2026-03-03 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CMEEEA 102-2026

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Medical electronic instruments and equipment

ICS Name: Measuring instruments and meters

Publish Date: 2026-02-04

Implement Date: 2026-03-03

Scope

This document specifies the environmental requirements, technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage for mass flow sensors used in the gas pipelines of semiconductor thin film deposition equipment. This document is applicable to sensors used in semiconductor thin film deposition processes for high-precision mass flow measurement of corrosive gases such as silane, ammonia, and nitrogen trifluoride.