T/BEA 40002-2022 Active Group standards

T/BEA 40002-2022 Microwave ECR plasma generator calibration specification

Publish Date: 2022-01-18 Implement Date: 2022-02-09 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/BEA 40002-2022

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Terminology (principles and coordination and cooperation)

Publish Date: 2022-01-18

Implement Date: 2022-02-09

Scope

Scope: This standard applies to the calibration and periodic calibration of plasma parameters for newly manufactured (or newly purchased) and repaired microwave ECR plasma generators used in vacuum environments. Main technical content: 1. Scope 1.1 Topic content: This specification defines the metrological characteristics, calibration conditions, calibration items, calibration methods, and processing of calibration results for microwave ECR plasma generators. 1.2 Applicability: This standard applies to the calibration and periodic calibration of plasma parameters for newly manufactured (or newly purchased) and repaired microwave ECR plasma generators used in vacuum environments. 2. Normative references The provisions of the following documents are incorporated by reference into this standard. For dated reference documents, all subsequent amendment sheets (excluding errata) or revised versions are not applicable to this standard. However, parties reaching agreements based on this standard are encouraged to investigate whether the latest versions of these documents can be used. For undated reference documents, the latest versions apply to this standard. - GJB 7363-2011: Dynamic Test Methods for Space Plasma Environments - JJF 1001-2011: General Metrological Terms and Definitions 3. Terminology definition 3.1 Microwave ECR plasma generator: A gas ionization device that uses electron cyclotron resonance and microwave coupling to generate stable plasma in a vacuum environment. 3.2 Plasma electron density: The number of electrons in a unit volume of plasma, used to characterize the degree of gas ionization into plasma, expressed in units of electrons per cubic meter (/m3). 3.3 Plasma electron temperature: When the plasma is in thermal equilibrium, it characterizes the average kinetic energy of electrons in the plasma, expressed in units of electron volts (eV). 3.4 Radial direction ratio: The ratio of the uniform plasma region generated in the vacuum chamber to the radi