T/CHBAS 22-2022 The mixed gas used in the electronics industry with a nitrogen/helium ratio of 0.52%
T/CHBAS 22-2022 The mixed gas used in the electronics industry with a nitrogen/helium ratio of 0.52%
Basic Information
Scope
Scope: This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage requirements for a 0.52% nitrogen/helium gas mixture. This document applies to 0.52% nitrogen/helium gas mixtures used in the electronics industry (hereinafter referred to as 0.52% nitrogen/helium gas mixtures). Nitrogen/helium gas mixtures with other component ratios may be referenced for implementation. Main technical content: This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage requirements for a 0.52% nitrogen/helium gas mixture. This document applies to 0.52% nitrogen/helium gas mixtures used in the electronics industry (hereinafter referred to as 0.52% nitrogen/helium gas mixtures). Nitrogen/helium gas mixtures with other component ratios may be referenced for implementation.