T/CHBAS 49-2023 Active Group standards

T/CHBAS 49-2023 Electronic industry gas - CH3F

Publish Date: 2023-12-22 Implement Date: 2023-12-30 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CHBAS 49-2023

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Industrial gases

Publish Date: 2023-12-22

Implement Date: 2023-12-30

Scope

Main technical content: This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation and storage, and safety of fluoromethane (hereinafter referred to as fluoromethane) used in the electronics industry. This document is applicable to fluoromethane used in the electronics industry, which is prepared by purification using industrial fluoromethane as a raw material and used as an etching gas in the plasma etching process of the electronics industry.

Development Information

Related Standards

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