T/ACCEM 456-2024 Active Group standards

T/ACCEM 456-2024 Ion-assisted deposition using radio frequency ion source

Publish Date: 2024-12-17 Implement Date: 2024-12-31 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/ACCEM 456-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Industrial gases

Publish Date: 2024-12-17

Implement Date: 2024-12-31

Scope

Main technical content: This document specifies the product parameters, technical requirements, test methods, inspection rules, marking, accompanying documents, packaging, transportation, and storage of radio frequency ion sources used in ion-assisted deposition. This document is applicable to the production and inspection of radio frequency ion sources used in ion-assisted deposition.

Development Information

Related Standards

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