T/CAEE 028-2026 high-purity sulfur trioxide for electronic-grade sulfuric acid manufacturing

Scope

5 Test Methods General Requirements 5.1.1 Laboratory Environment The test should be conducted in a clean, dry, and well-ventilated laboratory. The laboratory temperature should be controlled at 20℃±2℃, and the relative humidity should be ≤65%. The laboratory should be far away from dust sources, pollution sources, and strong electromagnetic interference sources to avoid environmental factors affecting the test results. The laboratory used for trace impurity detection should comply with the requirements for clean laboratories, and the content of suspended particles and metal impurities in the air should be controlled at an extremely low level. 5.1.2 Test Water The pure water used for the test should comply with the requirements for Class I water in GB/T 6682, with a resistivity of ≥18.2MΩ·cm (25℃), a total organic carbon (TOC) of ≤10ppb, and a metal impurity content of ≤0.1ppb. The test water should be degassed before use to avoid interference from dissolved gases in the water on the test results. 5.1.3 Test Equipment All test equipment (including volumetric flasks, pipettes, crucibles, colorimetric tubes, etc.) should be made of corrosion-resistant and low-impurity materials, such as borosilicate glass, PFA, and PTFE. The test equipment should be thoroughly cleaned and calibrated before use: first soaked in a dilute nitric acid solution (1+9) for 24 hours, then rinsed with Class I water at least 10 times, and finally dried in a 105℃±2℃ oven until constant weight. After cooling, it is ready for use. For precision instrument analysis such as ICP-MS and ion chromatography, the equipment should also undergo blank verification to ensure that the equipment itself does not introduce impurities. 5.1.4 Reagents and Materials All reagents used in the test should be of superior purity or higher purity levels, and their impurity content should be far lower than the impurity limits of the samples being tested to avoid interference from the reagents. Standard samples should be

Development Information

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