T/BEA 40004-2024 Active Group standards

T/BEA 40004-2024 (10-1~10-7) Field calibration specification for vacuum gauge in Pa

Publish Date: 2024-09-10 Implement Date: 2024-09-18 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/BEA 40004-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Integrated Metrology and Measurement

Publish Date: 2024-09-10

Implement Date: 2024-09-18

Scope

Scope: This specification applies to the on-site calibration and use inspection of vacuum gauges with a measurement range of (10-1~10-7) Pa using a vacuum degree on-site calibration device. Main technical content: 3.1 Terminology definition The following terms and definitions apply to this specification. 3.1 Dynamic flow method A calibration method that compares the standard pressure obtained by the dynamic flow method with the pressure measured by the calibrated vacuum gauge. 3.2 Dynamic comparison method A calibration method that compares the standard pressure obtained by the dynamic method with the pressure measured by the calibrated vacuum gauge. 4 Overview 4.1 Structure The vacuum gauge on-site calibration device features compactness, portability, and ease of movement, enabling it to be brought to the production site for calibration work. The vacuum gauge on-site calibration device mainly consists of a calibration chamber, a standard vacuum gauge, a pumping system, and a control system. RP1 is a mechanical pump; TMP1 and TMP2 are molecular pumps; VC1 is a calibration chamber; VC2 is a pressure stabilization chamber; C1, C2, and C3 are small orifices; V1 is a baffle valve; V4 is a fine-tuning valve; V11 and V12 are solenoid valves; and the remaining valves are ball valves. G1 is an ionization gauge; G2 is a full-scale vacuum gauge; and G3, G4, and G5 are capacitive film vacuum gauges with full-scale readings of 133 Pa, 1330 Pa, and 133000 Pa. The device principle diagram is shown in Figure 1. Figure 1: Principle diagram of the vacuum gauge on-site calibration device. 4.2.1 Dynamic flow method The dynamic flow method uses the inlet orifice C1 to continuously expand high-pressure gas into the calibration chamber under molecular flow conditions. Through the limiting orifice C2 below the calibration chamber, the chamber is continuously pumped, forming a dynamic stable pressure in the calibration chamber, which is used as a reference stand