GB 50467-2008 Active National standards force_standard

GB 50467-2008 Code for construction and acceptance of micro-electronics manufacturing equipment installation engineering

Publish Date: 1970-01-01 Implement Date: 2009-07-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: GB 50467-2008

Standard Type: National standards

Standard Status: Active

is_force_gb: yes

CCS Name: Electric equipment installation project

ICS Name: \nLighting installation system

Publish Date: 1970-01-01

Implement Date: 2009-07-01

Pages: 37 pages

Scope

This specification applies to the construction and acceptance of integrated circuit and semiconductor discrete device production equipment installation projects. This specification does not include the linkage debugging and trial production of integrated circuit and semiconductor discrete device production equipment. The requirements for construction and quality acceptance in the construction of microelectronics production equipment installation projects shall not be lower than those stipulated in this specification. The installation of microelectronics production equipment shall be carried out in accordance with the approved design drawings. Any modification to the design shall be subject to the change notice from the original design unit. The instruments and meters used for testing shall be verified and qualified by the national statutory metrological inspection institutions, and shall be used within the validity period of the verification. In addition to complying with this specification, the construction and acceptance of microelectronics production equipment installation projects shall also comply with the provisions of the relevant national standards currently in force.