T/BSPT 001-2018 Active Group standards

T/BSPT 001-2018 Laser-induced strain-based large-area surface three-dimensional nano-microstructure processing method

Publish Date: 2018-06-20 Implement Date: 2018-07-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/BSPT 001-2018

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Optoelectronic devices

ICS Name: The experimental conditions and procedures are summarized here

Publish Date: 2018-06-20

Implement Date: 2018-07-01

Scope

Scope: This standard specifies a method for processing large-area three-dimensional micro-nano structures on surfaces based on laser-induced strain. This standard is applicable to the design and fabrication of various surface three-dimensional micro-nano structures on the surface of wafers by using laser-induced strain to regulate the strain structure of multi-layer film systems. Main technical content: Surface micro-nano structures exhibit many unique optical, electrical, magnetic, and other properties, and have been widely applied in many fields. With the rapid development of surface science and engineering technology, people have put forward increasingly higher requirements for the complexity, multi-levelness, and large area of surface structures, which pose new challenges to existing conventional micro-nano processing technologies in terms of cost, process, mass production, precision design, and controllable processing. In recent years, various new unconventional processing methods have been continuously explored and developed to meet these new challenges. The laser-induced strain processing method has the characteristics of precise design, controllable large-area manufacturing, and the ability to achieve complex multi-level structures and large-scale low-cost manufacturing. This standard provides a specification for a method of processing large-area surface three-dimensional micro-nano structures based on laser-induced strain. The issuing agency of this document draws attention to the fact that when declaring compliance with this document, it may involve the use of patents related to the preparation of nano-thin films [Article 7.2] and the content of the patent with the patent number ZL201010033715.9 [A superfine crystalline metal or alloy and its preparation method].