T/ZZB 2283-2021 Active Group standards

T/ZZB 2283-2021 Semiconductor-grade silicon carbide single crystal using ultra-pure graphite powder

Publish Date: 2021-08-26 Implement Date: 2021-09-26 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/ZZB 2283-2021

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Special carbon materials

ICS Name: Conductor materials

Publish Date: 2021-08-26

Implement Date: 2021-09-26

Scope

Main technical content: This document specifies the terms and definitions of ultra-high purity graphite powder for semiconductor-grade silicon carbide single crystals, material specifications, basic requirements, technical requirements, test methods, inspection rules, marking, packaging, transportation and storage, and quality commitments. This document is applicable to graphite powder for semiconductor-grade silicon carbide single crystals with a purity of more than 5N (99.999 wt%).