GB/T 44631-2024 Active National standards

GB/T 44631-2024 Requirements for wafer carrier handoff parallel I/O interface

GB/T 44631-2024 Requirements for wafer carrier handoff parallel I/O interface

Publish Date: 2024-09-29 Implement Date: 2025-04-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us
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Basic Information

Standard Code: GB/T 44631-2024
Standard Type: National standards
Standard Status: Active
is_force_gb: no
CCS Name: Special processing equipment
ICS Name: Optoelectronics, laser equipment
Publish Date: 2024-09-29
Implement Date: 2025-04-01
Pages: 40 pages

Scope

This document specifies the signal definitions, signal transmission requirements, exception handling, and connector and sensor requirements for the automatic transfer of parallel input/output interfaces on wafer carriers.
This document is applicable to the semiconductor manufacturing field and is used for the automatic transfer operation of wafer carriers between active and passive devices.

Development Information

Word Count: 61 Thousand words Pages: 40 pages

Referenced Standards

Related Standards

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