T/SZZXH 5-2025 Active Group standards

T/SZZXH 5-2025 Technical Specifications for Valves Made from Perfluoroalkoxy Vinyl Ether Copolymer Used in Semiconductor Manufacturing

T/SZZXH 5-2025 Semiconductor manufacturing grade perfluorinated alkyl ether copolymer valve technical specification

Publish Date: 2025-05-30 Implement Date: 2025-06-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Price: $ 20.00

Out of stock

Basic Information

Standard Code: T/SZZXH 5-2025

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Mechanical

ICS Name: Other valves

Publish Date: 2025-05-30

Implement Date: 2025-06-01

Scope

Main technical content: This document specifies the manufacturing requirements, technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage for perfluoroalkoxy vinyl ether copolymer valves used in semiconductor manufacturing. This document is applicable to the manufacture and inspection of PFA valves.