T/CHBAS 45-2023 Active Group standards

T/CHBAS 45-2023 Electronic industry gas mixture of fluorine gas

T/CHBAS 45-2023 Electronic industry gas mixture of fluorine gas

Publish Date: 2023-12-22 Implement Date: 2023-12-30 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us
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Basic Information

Standard Code: T/CHBAS 45-2023
Standard Type: Group standards
Standard Status: Active
is_force_gb: no
CCS Name: -
ICS Name: Industrial gases
Publish Date: 2023-12-22
Implement Date: 2023-12-30

Scope

Main technical content: This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation, storage, and safety of fluorine gas mixtures used in the electronics industry (hereinafter referred to as fluorine gas mixtures). This document is applicable to fluorine gas mixtures used in the electronics industry, mainly for laser gases, automobiles, and fluorination processing of materials in the pharmaceutical industry. The balance gas in fluorine gas mixtures is often nitrogen, neon, or helium, or other gases that do not react chemically with fluorine gas and do not affect the reaction process.

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