T/CHBAS 45-2023
Active
Group standards
T/CHBAS 45-2023 Electronic industry gas mixture of fluorine gas
T/CHBAS 45-2023 Electronic industry gas mixture of fluorine gas
Price:
$ 20.00
Basic Information
Standard Code:
T/CHBAS 45-2023
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Industrial gases
Publish Date:
2023-12-22
Implement Date:
2023-12-30
Scope
Main technical content: This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation, storage, and safety of fluorine gas mixtures used in the electronics industry (hereinafter referred to as fluorine gas mixtures). This document is applicable to fluorine gas mixtures used in the electronics industry, mainly for laser gases, automobiles, and fluorination processing of materials in the pharmaceutical industry. The balance gas in fluorine gas mixtures is often nitrogen, neon, or helium, or other gases that do not react chemically with fluorine gas and do not affect the reaction process.
Development Information
Related Standards
GB 4962-1985
Replaced
GB/T 8981-1988
Replaced
GB/T 8981-1988 Determination of trace hydrogen in gases—Gas chromatographic method
GB/T 10627-1989
Replaced
GB/T 10627-1989 Gas analysis—Preparation of calibration gas mixtures—Static volumetric methods
GB/T 10628-1989
Replaced
GB/T 10628-1989 Gas analysis—Determination of composition of calibration gas mixtures—Comparison methods
GB 13548-1992
Replaced
GB 13548-1992 General principle of safety assessment for phosgene and its products plant
GB 13591-1992
Replaced