GB 4962-1985
Replaced
T/ICMTIA 3-2020
Active
Group standards
T/ICMTIA 3-2020 Silane, with six chlorine atoms. This is commonly used in integrated circuits
T/ICMTIA 3-2020 Silane, with six chlorine atoms. This is commonly used in integrated circuits
Price:
$ 20.00
Basic Information
Standard Code:
T/ICMTIA 3-2020
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Industrial gases and chemical gases
ICS Name:
Industrial gases
Publish Date:
2020-02-24
Implement Date:
2020-04-24
Scope
Scope: This standard applies to hexachloroethylsilane for integrated circuits, which is purified or chemically synthesized using polysilicon by-product hexachloroethylsilane as a raw material. Hexachloroethylsilane for integrated circuits is mainly used in the low-temperature and low-pressure deposition process of silicon oxide films and silicon nitride films in the semiconductor industry, and it is also an excellent siloxane precursor and optical fiber raw material. Main technical content: This standard specifies the technical requirements, testing methods, packaging and transportation, and safety requirements for hexachloroethylsilane for integrated circuits. Among them, the testing methods cover sampling and determination principles, determination of components, and determination of impurity element content, etc.
Development Information
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