GB/T 3163-1993
Replaced
T/ZZB 1790-2020
Active
Group standards
T/ZZB 1790-2020 Copper Indium Gallium Selenide Solar Cell Thin Film Deposition Equipment for Sputtering Deposition
T/ZZB 1790-2020 Copper Indium Gallium Selenide Solar Cell Thin Film Deposition Equipment for Sputtering Deposition
Price:
$ 20.00
Basic Information
Standard Code:
T/ZZB 1790-2020
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Insertion, pulling, planing, and sawing machines
ICS Name:
Vacuum technology
Publish Date:
2020-11-06
Implement Date:
2020-11-30
Scope
Main technical content: This document specifies the terms and definitions, structure, and usage environment, basic requirements, technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage, as well as quality commitments for copper-indium-gallium-selenium solar cell thin-film sputtering deposition equipment. This document is applicable to copper-indium-gallium-selenium solar cell thin-film sputtering deposition equipment (hereinafter referred to as "equipment")
Development Information
Related Standards
GB/T 3164-1993
Replaced
GB/T 3164-1993 Vacuum technology—Graphical symbols
GB/T 6070-1995
Replaced
GB/T 6070-1995 Vacuum flanges
GB/T 11164-1999
Replaced
GB/T 11164-1999 Vacuum coating plant generic specification
GB/T 18193-2000
Active
GB/T 18193-2000 Vacuum technology—Mass-spectrometer-type leak-detector calibration
GB/T 4982-2003
Replaced