T/CEMIA 036-2023 Active Group standards

T/CEMIA 036-2023 High alkali concentration negative photoresist developer for semiconductor display

T/CEMIA 036-2023 High alkali concentration negative photoresist developer for semiconductor display

Publish Date: 2023-11-06 Implement Date: 2023-12-30 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us
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Basic Information

Standard Code: T/CEMIA 036-2023
Standard Type: Group standards
Standard Status: Active
is_force_gb: no
CCS Name: Electronic devices and specialized materials, parts, and structural components
ICS Name: Special materials for electronic technology
Publish Date: 2023-11-06
Implement Date: 2023-12-30
Pages: 16 pages

Scope

This document specifies the abbreviations, technical requirements, inspection methods, inspection rules, marking and packaging, transportation, storage, and safety matters for high-alkali concentration negative resist developing solutions used in semiconductor displays. This document applies to high-alkali concentration negative resist developing solutions composed of potassium hydroxide, surfactants, and water, with a mass percentage of potassium hydroxide greater than 8%. This high-alkali concentration negative resist developing solution is mainly used for developing negative photoresists in semiconductor manufacturing processes, as well as developing photoresists in thin-film transistor liquid crystal displays (TFT-LCDs) or organic light-emitting diode displays (OLEDs).

Development Information

Word Count: 19 Thousand words Pages: 16 pages

Referenced Standards

GB 190-1990 Labels for packages of dangerous goods GB 190-2009 Packing symbol of dangerous goods GB/T 601-2002 Chemical reagent Preparations of standard volumetric solutions GB/T 601-2016 Chemical reagent—Preparations of reference titration solutions GB/T 602-2002 Chemical reagent—Preparations of standard solutions for impurity GB/T 603-2002 Chemical reagent—Preparations of reagent solutions for use in test methods GB/T 603-2023 Chemical reagent—Preparations of reagent solutions for use in test methods GB/T 611-2021 Chemical reagent—General method for the determination of density GB/T 3143-1982 Color determination method of liquid chemicals (Hazen unit—platinum-cobalt scale) GB/T 5559-1993 Non-ionic surface active agents obtained from ethylene oxide and ethylene oxide/propylene oxide block copolymers—Determination of cloud point GB/T 5559-2010 Non-ionic surface active agents obtained from ethylene oxide and ethylene oxide/propylene oxide block copolymers—Determination of cloud point GB/T 6678-2003 General principles for sampling chemical products GB/T 6680-2003 General rules for sampling liquid chemical products GB/T 8170-1987 Rules for rounding off of numberical values GB/T 8170-2008 Rules of rounding off for numerical values & expression and judgement of limiting values GB/T 9724-2007 Chemical reagent—General rule for the determination of pH GB/T 9725-1988 Chemical reagent General rules for potentiometric titration GB/T 9725-2007 Chemical reagent—General rule for potentiometric titration GB/T 11446.1-1997 Electronic grade water GB/T 11446.1-2013 Electronic grade water GB 15258-1999 General rules for preparation of precautionary label for industrial chemicals GB 15258-2009 General rules for preparation of precautionary label for chemicals GB 15603-1995 Rule for storage of chemical dangers GB 15603-2022 General rules for the hazardous chemicals warehouse storage GB/T 34672-2017 Chemical reagent—General rules for the ion chromatography GB 50073-2013 Code for design of clean room SJ/T 11635-2016 Determination of carbonate ion in developer used in electronic industry by automatic potentiometric titration SJ/T 11638-2016 The testing methods for particles in electronic chemicals SJ/T 11508-2015 Positive photoresist developer for integrated circuits GB/T 602-2026 Chemical reagent—Preparations of standard solutions for impurity

Related Standards

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