T/CAB 0156-2022 Intelligent household appliances use metal oxide MEMS gas sensors
T/CAB 0156-2022 Intelligent household appliances use metal oxide MEMS gas sensors
Basic Information
Scope
Scope: This document specifies the terms and definitions, technical requirements, and test methods for metal oxide MEMS gas sensors used in smart appliances. Note: For the sake of clarity, "metal oxide MEMS gas sensors" are referred to as "MEMS gas sensors" in this document. This document is applicable to the design, production, and testing of MEMS gas sensors for household appliances and similar applications. The water source used in the products specified by this standard shall comply with the requirements of GB 5749 for drinking water. Main technical content: The MEMS gas sensors described in this document are manufactured by integrating micro-nano-structured semiconductor gas-sensitive materials with heaters using MEMS technology. They achieve gas concentration detection functions on silicon wafers to enable intelligent feedback control for household appliances.