T/JSSES 16-2021 Active Group standards

T/JSSES 16-2021 Integrated utilization technology requirements and testing methods for waste sulfuric acid in the integrated circuit industry

Publish Date: 2021-05-28 Implement Date: 2021-06-28 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/JSSES 16-2021

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Integrated Environmental Protection

ICS Name: Quantity and units

Publish Date: 2021-05-28

Implement Date: 2021-06-28

Scope

Main technical specifications: Item Standard Sulfuric acid (H2SO4) mass fraction (%) ≥50 Hydrogen peroxide mass fraction (%) ≤0.1 Ash mass fraction (%) ≤0.05 Copper (Cu) mass fraction (%) ≤0.0005 Iron (Fe) mass fraction (%) ≤0.01 Arsenic (As) mass fraction (%) ≤0.0005 Lead (Pb) mass fraction (%) ≤0.01 Mercury (Hg) mass fraction (%) ≤0.005 Cadmium (Cd) mass fraction (%) ≤0.0005 Chromium (Cr) mass fraction (%) ≤0.0025 Nickel (Ni) mass fraction (%) ≤0.0025 Total organic carbon (TOC) (mg/L) ≤500 Transparency/mm ≥30