GB/T 4855-1984
Abolished
T/EDASQUARE 010-2023
Active
Group standards
T/EDASQUARE 010-2023 Optical Proximity Correction (OPC) model simulation software modeling input data structure
T/EDASQUARE 010-2023 Optical Proximity Correction (OPC) model simulation software modeling input data structure
Price:
$ 20.00
Basic Information
Standard Code:
T/EDASQUARE 010-2023
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Integrated circuits, microelectronics
Publish Date:
2023-09-10
Implement Date:
2023-09-10
Scope
Main technical content: It specifies the basic format of wafer pattern measurement data, the basic format of the photolithography process parameter table, the basic format of the underlying film structure parameters involved, and the basic format of the three-dimensional structure parameters of the photolithography mask involved, etc. It standardizes the input data structure of OPC modeling and simulation software
Development Information
Related Standards
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