T/NLIA 002-2021 Active Group standards

T/NLIA 002-2021 Simulation specifications for encapsulation process of automotive MEMS pressure sensors

Publish Date: 2021-04-26 Implement Date: 2021-06-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/NLIA 002-2021

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Microcircuit

ICS Name: Optoelectronics, laser equipment

Publish Date: 2021-04-26

Implement Date: 2021-06-01

Scope

Main technical content: This document specifies the simulation information of the encapsulation process for automotive MEMS pressure sensors, including the basic process of simulating the encapsulation process of automotive MEMS pressure sensors: simulation model construction, simulation run analysis, result evaluation, and process optimization. This document is used to guide the production, supply, and use of automotive MEMS pressure sensor products, in order to promote the use of sensor process simulation models and the improvement of the encapsulation process. The automotive MEMS pressure sensor products applicable to this document include: automotive tire pressure sensors; engine oil pressure sensors; fuel pressure sensors; fuel vapor pressure sensors; brake vacuum sensors; automotive exhaust gas pressure sensors, etc.