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GB/T 14602-2014

GB/T 14602-2014 Gases for electronic industry—Hydrogen chloride

Available format(s)
PDF
Language(s)
Chinese
Publish Date
2014-12-22

Abstract

This standard specifies the technical requirements, test methods, marking, packaging, storage and transportation, and safety of hydrogen chloride. This standard applies to hydrogen chloride products made from industrial hydrogen chloride using purification methods. This product is mainly used in the microelectronics industry for vapor polishing, epitaxy, and etching processes, and can also be used in fields such as hard alloy processing, glass surface treatment, pharmaceutical intermediates and fine chemicals manufacturing, and scientific research. Molecular formula: HCl. Relative molecular mass: 36.458 (calculated based on the 2009 International Relative Atomic Mass).

General Product Information

Document Type National standards
Standard Status Replaced
Standard Code GB/T 14602-2014
CCS Industrial gases and chemical gases
ICS Industrial gases
Implement Date 2015-07-01
Price $ 29.00
Subtotal $ 29.00
Tax $ 0.00
Order Total (incl. tax) $ 29.00

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