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GB/T 16945-2009
GB/T 16945-2009 Gas for electronic industry—Argon
Abstract
This standard specifies the technical requirements, test methods, and packaging, marking, storage, transportation, and safety of argon.
This standard applies to liquid and gaseous argon extracted from air and synthetic ammonia tail gas by cryogenic methods, as well as argon obtained by purification methods.
Argon is used for system purging, protection, and pressurization. It can also be used in various processes such as chemical vapor deposition, sputtering, plasma and reactive ion etching agents, and annealing.
Molecular formula: Ar.
Relative molecular mass: 39.948 (according to the 2005 International Atomic Mass Table).
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Replaced |
| Standard Code | GB/T 16945-2009 |
| CCS | Industrial gases and chemical gases |
| ICS | Industrial gases |
| Implement Date | 2010-05-01 |
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