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GB/T 12964-2018 Active
GB/T 12964-2018 Monocrystalline silicon polished wafers
Abstract
This standard specifies the grades and classification, requirements, test methods, inspection rules, marking, packaging, transportation, storage, quality certificates, and order forms (or contracts) of silicon single-crystal wafers (referred to as silicon polished wafers). This standard applies to silicon single-crystal wafers with a diameter of not more than 200 mm, prepared by the direct pulling method and the floating zone melting method (including neutron transmutation doping and gas phase doping). The products are mainly used for the manufacture of integrated circuits, discrete components, power devices, etc., or as the substrates for silicon epitaxial wafers.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 12964-2018 |
| CCS | Element semiconductor materials |
| ICS | Semiconductor materials |
| Implement Date | 2019-06-01 |
Price
$ 50
Subtotal
$ 50
Tax
$ 0.00
Order Total (incl. tax)
$ 50